Impossible? We don’t let go until it's proven possible.

ASML is well-known for its leading role in nano lithography. However, over the years ASML has also developed its own optical metrology system “YieldStar” that is being used by many of ASML’s customers in various applications like overlay control. In this presentation I will tell more about the history and the technology of YieldStar and the lessons that we had to learn before YieldStar was accepted by ASML’s customers. Finally, I will give a brief outlook of future optical metrology challenges that drive the need for continuous metrology innovations.