19 April 2024
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In the technology region of Brainport Eindhoven, we work intelligently together as thinkers and doers. The possibilities are endless within Brainport. Discover, learn and grow.
Whether you are studying, working or having a company here, Brainport Eindhoven offers limitless opportunities for growth. Your success depends on the way you overcome your challenges. Please contact Brainport if you need any support. We will help you gain more knowledge and new perspectives or we will just answer your questions.
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Speaker: Jan Mulkens, ASML
ASML has been on a scaling journey within the lithography process for more than 37 years. This scaling, what we call ‘shrink’, has been enabled by etching chip patterns using increasingly lower ultra-violet wavelengths and higher numerical aperture (NA) optical systems – namely, lenses and mirrors. While extreme ultra-violet (EUV) wavelength is able to print the smallest features, deep ultra-violet (DUV) continues to be the workhorse of the industry. In this talk I will invite the audience to join me as we review the major breakthroughs during ASML’s DUV scaling journey. These breakthroughs show how unimaginable optical and mechanical tricks have brought ASML to the leading edge of the semiconductor industry.
"1988 was a great year, not only for football but also for ASML."