Nano Electronics - Mobility
How to reproducible generate Nano- particles in vacuum
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VDL ETG Case
In the field of Nano electronics, contamination control becomes more and more important. For design studies we need to perform experiments in vacuum under controlled conditions. Regarding particle cleanliness this means that the ability to generate a known amount of particle with a certain size is needed. Typical particle to be use for experiments are 100 to 5000 nm diameter melamine formaldehyde particles coated with a silver layer of several hundred nanometers thick.
Target specification for the particle generator is:
- 1000 particles generated in 5 seconds.
- Reproducibility better than 5%
Physics, Mechanical engineering. Level: MSc
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